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Home Products Semiconductor Wafer Inspection Systems
Semiconductor Wafer Inspection Systems

Semiconductor Wafer Inspection Systems

Power Devices

SICA108

SiC Wafer Inspection and Review System

SICA108

SICA88

SiC Wafer Inspection and Review System

SICA88

GALOIS211

GaN Wafer Inspection and Review System

GALOIS211

Wafers

EZ Series

Wafer Edge-Dimension Measurement System

EZ Series

MAGICS Series M5640

Wafer Inspection and Review System

MAGICS Series M5640

Front-end Process

CIRIUS Series

High Sensitivity Under-layer Defect Inspection and Review System

CIRIUS Series

VIANCA Series

Via Depth Measurement System

VIANCA Series

Middle-end Process

CIEL Series

High Sensitivity Wafer Edge Inspection System

CIEL Series

BGM Series

TSV Back Grinding Process Measurement System

BGM Series

BIM Series

Fully Automated Wafer Measurement System

BIM Series

Others

LX Series

Multi-Wavelength Wafer Inspection System

LX Series

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Lasertec China Co., Ltd.

We provide advanced optical inspection equipment and solutions.

Zhangjiang Hi-Tech Park, Pudong New Area
Room 1101, 1F, Lingyang Building, No. 1077 Zuchongzhi Road, Shanghai

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