Semiconductor Mask Inspection Systems

Actinic EUV Patterned Mask Inspection System

ACTIS A300 Series

Mask Inspection System

MATRICS X9ULTRA Series

Mask Inspection System

MATRICS X810EX Series

Actinic EUV Patterned Mask Inspection System

ACTIS A150

Mask Edge Inspection System

MZ100

Mask Inspection System

MATRICS X8ULTRA Series

Mask Inspection System

MATRICS X800LITE Series

EUV Pellicle Inspection System

PELMIS Series

Phase-Shift and Transmittance Measurement System

MPM248

Phase-Shift and Transmittance Measurement System

MPM193EX

Mask Defect Review System

MRS193EX

Mask Blanks Inspection and Review System

MAGICS Series M6750/M6751

Mask Blanks Inspection and Review System

MAGICS Series M6640S/M6641S

Mask Blanks Inspection and Review System

MAGICS Series M9650/M9651

EUV Mask Blanks Inspection and Review System

ABICS Series E320

EUV Mask Blanks Inspection and Review System

ABICS Series E120

High Sensitivity Under-layer Defect Inspection and Review System

CIRIUS Series

EUV Mask Backside Inspection and Cleaning System

BASIC Series

Mask Inspection System

MATRICS X9ULTRA Series

Mask Inspection System

MATRICS X8ULTRA Series

Mask Inspection System

MATRICS X810EX Series

Mask Inspection System

MATRICS X800LITE Series

Via Depth Measurement System

VIANCA Series

TSV Back Grinding Process Measurement System

BGM Series

Fully Automated Wafer Measurement System

BIM Series

Multi-Wavelength Wafer Inspection System

LX Series

High Sensitivity Wafer Edge Inspection System

CIEL Series