Products List

Microscopes

Laser Microscopes

OPTELICS HYBRID+

Laser Microscope

OPTELICS HYBRID+

OPTELICS AI²

Automatic Inspection and Review System

OPTELICS AI²

OPTELICS IR

Infrared Confocal Microscope

OPTELICS IR

Electro-Chemical Reaction Visualizing Confocal System

ECCS B320

Electro-Chemical Reaction Visualizing Confocal System

ECCS B320

Ultra High Temperature Observation Laser Microscope System

VL3000DX-SVF18SP

In-Situ Observation at Ultra High Temperature Confocal Scanning Laser Microscope

VL3000DX-SVF18SP

Semiconductor Mask Inspection Systems

Mask Manufacturing

Regular Inspection
ACTIS A300 Series

Actinic EUV Patterned Mask Inspection System

ACTIS A300 Series

MATRICS X9ULTRA Series

Mask Inspection System

MATRICS X9ULTRA Series

MATRICS X810EX Series

Mask Inspection System

MATRICS X810EX Series

ACTIS A150

Actinic EUV Patterned Mask Inspection System

ACTIS A150

MZ100

Mask Edge Inspection System

MZ100

MATRICS X8ULTRA Series

Mask Inspection System

MATRICS X8ULTRA Series

MATRICS X800LITE Series

Mask Inspection System

MATRICS X800LITE Series

Shipping Inspection
PELMIS Series

EUV Pellicle Inspection System

PELMIS Series

MPM248

Phase-Shift and Transmittance Measurement System

MPM248

MPM193EX

Phase-Shift and Transmittance Measurement System

MPM193EX

MRS193EX

Mask Defect Review System

MRS193EX

Blank Manufacturing

Acceptance Inspection
MAGICS Series M6750/M6751

Mask Blanks Inspection and Review System

MAGICS Series M6750/M6751

MAGICS Series M6640S/M6641S

Mask Blanks Inspection and Review System

MAGICS Series M6640S/M6641S

Shipping Inspection
MAGICS Series M9650/M9651

Mask Blanks Inspection and Review System

MAGICS Series M9650/M9651

ABICS Series E320

EUV Mask Blanks Inspection and Review System

ABICS Series E320

ABICS Series E120

EUV Mask Blanks Inspection and Review System

ABICS Series E120

Device Manufacturing

Regular Inspection
CIRIUS Series

High Sensitivity Under-layer Defect Inspection and Review System

CIRIUS Series

BASIC Series

EUV Mask Backside Inspection and Cleaning System

BASIC Series

MATRICS X9ULTRA Series

Mask Inspection System

MATRICS X9ULTRA Series

MATRICS X8ULTRA Series

Mask Inspection System

MATRICS X8ULTRA Series

MATRICS X810EX Series

Mask Inspection System

MATRICS X810EX Series

MATRICS X800LITE Series

Mask Inspection System

MATRICS X800LITE Series

Via Process
VIANCA Series

Via Depth Measurement System

VIANCA Series

BGM Series

TSV Back Grinding Process Measurement System

BGM Series

BIM Series

Fully Automated Wafer Measurement System

BIM Series

Lithography Process
LX Series

Multi-Wavelength Wafer Inspection System

LX Series

CIEL Series

High Sensitivity Wafer Edge Inspection System

CIEL Series

Semiconductor Wafer Inspection Systems

Power Devices

SICA108

SiC Wafer Inspection and Review System

SICA108

SICA88

SiC Wafer Inspection and Review System

SICA88

GALOIS211

GaN Wafer Inspection and Review System

GALOIS211

Wafers

EZ Series

Wafer Edge-Dimension Measurement System

EZ Series

MAGICS Series M5640

Wafer Inspection and Review System

MAGICS Series M5640

Front-end Process

CIRIUS Series

High Sensitivity Under-layer Defect Inspection and Review System

CIRIUS Series

VIANCA Series

Via Depth Measurement System

VIANCA Series

Middle-end Process

CIEL Series

High Sensitivity Wafer Edge Inspection System

CIEL Series

BGM Series

TSV Back Grinding Process Measurement System

BGM Series

BIM Series

Fully Automated Wafer Measurement System

BIM Series

Others

LX Series

Multi-Wavelength Wafer Inspection System

LX Series